Intra-bay transportation systems reduce conveyance lead times by sending items
directly from one tool port to another tool port.
Inter-bay transportation systems transport large quantities of in-process
items at high-speeds to the clean depot system nearest the next process.
Features of Installed Equipment
Clean Depot Systems
Facilitates efficient storage within the Clean room. Storage and retrieval
commands are automatically issued for transport equipment in the Inter/Intra Bay
and to operators in the clean room area.
Intra-bay Automated Overhead Traveling Vehicles
Helps shorten transportation lead times.
Effectively utilizes ceiling space and reduces factory footprint.
Inter-bay Automated Overhead Traveling Vehicles
Transportation of large quantities of in-process items between depots.
Murata AMHS Control System (MACS)
Host computer (MACS) issues the commands to each conveyance device and controls
and monitors the status of these devices.
